Low Coherence Interferometer for measuring planar shapes OptoFlat
It is possible to easily measure the planar shape using the low coherence interference principle.Despite its compact and stable mechanical design, it is cheaper than conventional interferometers.
Features
Reduction of backside reflection
Laser interferometers are difficult to measure in some cases because the reflected wavefront on the backside affects the reflected wavefront on the frontside. In the low coherence interference principle, limiting coherence over a short region allows suppression of interference from the back surface, producing interference fringes from only the front surface.
High-power LED light source
By using high-power LED light source, it can generate clean interference fringes and measure phases at the sub-nanometer level. LED technology also eliminates laser safety issues and provides high reliability for long lifetimes. The extended light source from the LED reduces coherent noise from diffraction by dust and scratches.
Measurement of Flatness and Waviness
<Measuring objects>
Glass, various coatings, aluminum coating, diffraction grating, etc.
<Main specifications>
Measurement accuracy: 1/20λ
RMS accuracy (Short-term): < 0.1nm
RMS repeatability (Short-term): < 0.03nm
RMS accuracy (Long-term): < 0.2nm
RMS repeatability (Long-term): < 0.1nm
Resolution: 1200 x 1200 pixels (1x), 1920 x 1200 pixels (4x)
Measurement time: < 1 sec (single-shot measurement)
