Polishing pads for semiconductors
This is polishing pads for semiconductor wafers. We offer a lineup of pads for primary polishing and finish polishing of various wafers.
It can contribute to solving problems such as flatness, haze, and scratch as well as polishing rate.
Features
●Velour polishing pad
It is a pad that demonstrates its ability for primary polishing, and the non-woven fabric with a single structure combine wear resistance, durability, and flexibility. We can make proposals according to the purpose such as hardness and chemical resistance. It is widely used not only for silicon, sapphire and compound wafers, but also for precision optical lenses and glass.
●Suede polishing pad
It is a flat finish polishing pad with a structure in which a continuous micro and macroporous layer of polyurethane resin formed on a resin-impregnated non-woven fabric, and it is a product with excellent polishing ability. We can make proposals according to the purpose such as hydrophilicity and chemical resistance. It is mainly used for silicon and compound semiconductors, as well as glass disks and LCD backpads.
